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Posts Tagged ‘AME’

AMC-Monitor T-1000: all-in-one analyzer for the semiconductor industry

Real-time VOC monitoring in FOUP, fab and the clean-room environment

Airborne Molecular Contamination (AMC) is more and more taking center stage in today’s semiconductor manufacturing processes. In the past the focus was on filtering particles from the ambient air in the clean-room to reduce their negative impact on production yield. Using  expensive air filtration equipment and transport containers for wafers, FOUPs – short for Front Opening Unified Pod, this problem is largely under control. While particles are still important, the contamination concern has shifted towards low-concentrated volatile molecules. These trace gases can be undesirable for semiconductor manufacturing processes and are therefore defined as airborne molecular contamination (AMC).

IONICON AMC-Monitor T-1000

To monitor AMC directly at the photolithography tool-level and in the transport and storage environment, real-time analyzers with low online detection limits and versatile usage scenarios are needed.

 

To address current and future challenges within and around fabrication plants, we have developed the modular and flexible monitoring platform AMC-Monitor T-1000.

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Pittcon week 2017: Real-Time Air Analysis with PTR-MS

An exciting program around IONICON’s PTR-TOFMS technology

Lukas Märk and Todd Rogers explaining the unique benefits of PTR-MS

Pittcon 2017 attracted thousands of scientists and industry decision makers who discovered the latest trends in laboratory instruments, one of which being the new PTR-TOF 4000.

We showcased our new real-time trace VOC analyzer at our booth and attracted the crowds. Our team was supported by our US distributor Trace VOC.

“The Air We Breathe In & Out at Pittcon”, presented by Jens Herbig

We also hosted a Pittcon expo live demo that was filled to the very last seat available. At “The Air We Breathe In & Out at Pittcon” attendees could get their breath analyzed in real-time or have a look at the VOC composition in the expo hall. They also learned about air composition and VOCs in general as well as how to analyze them. (more…)