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AMC-Monitor T-1000: all-in-one analyzer for the semiconductor industry

Real-time VOC monitoring in FOUP, fab and the clean-room environment

Airborne Molecular Contamination (AMC) is more and more taking center stage in today’s semiconductor manufacturing processes. In the past the focus was on filtering particles from the ambient air in the clean-room to reduce their negative impact on production yield. Using  expensive air filtration equipment and transport containers for wafers, FOUPs – short for Front Opening Unified Pod, this problem is largely under control. While particles are still important, the contamination concern has shifted towards low-concentrated volatile molecules. These trace gases can be undesirable for semiconductor manufacturing processes and are therefore defined as airborne molecular contamination (AMC).

IONICON AMC-Monitor T-1000

To monitor AMC directly at the photolithography tool-level and in the transport and storage environment, real-time analyzers with low online detection limits and versatile usage scenarios are needed.

 

To address current and future challenges within and around fabrication plants, we have developed the modular and flexible monitoring platform AMC-Monitor T-1000.

AMC-Monitor user interface with real-time contamination data

The customizable system is based on a time-of-flight (TOF) analyzer combined with the Automated Measurement and Evaluation (AME) software suite incl. pre-set recipes for the respective monitoring challenge. The fast analysis allows for multiplexed sampling, minimizing analysis costs per sampling point.

Benefits

The AMC Monitor T-1000 offers the following exclusive benefits:

  • incredible speed & multiplexing
  • high sensitivity – low detection limits
  • enhanced separation in complex samples
  • simple user interface

Applications

The AMC-Monitor T-1000 represents a solution for all these applications:

FOUP analysis with a focus on VOC and condensables incl. full integration with Pfeiffer Vacuum APA 302 pod analyzer.

Clean-room monitoring in fabrication plants: automated detection of AMC at multiple sampling points with an integrated multiplexing system, directly in the fab at variable locations and even at the tool-level.

Monitoring of outside and intake air: automated fence line monitoring incl. alarm levels, up- and downstream filter testing.

Contact us for your individual AMC-Monitoring solution!

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